comX 51CA-RE\R

EtherCAT has become the established communication protocol in the field of semiconductor manufacturing. The Real-Time Ethernet protocols are typically addressed via the IP address or remotely. For the semiconductor industry, ETG (EtherCAT Technology Group) has defined a special profile, which was specified in the ETG.5003 "Semiconductor Device Profile". The largest manufacturers of production machines for the semiconductor industry, such as Applied Materials, Lam Research, and Tokyo Electron, were actively involved in the development of the standard, which made it easy to specify interoperability of different devices.

The communication protocol EtherCAT is used as standard in the semiconductor market, and the demand for products that address by means of rotary coding switches has been growing exponentially for years. Equipment manufacturers who want to sell their products in the semiconductor market will no longer be able to avoid the ETG standard.

The comX 51CA-RE\R is based on the classic comX 51 design, which is well established in the market. With the addition of physical address rotary coding switches, the explicit device ID can be set according to the Common Device Profile (CDP, ETG.5003-1). The interaction of Hilscher's in-house developed hardware and software, enables users to develop a device according to the Common Device Profile, which forms the basis for device development according to SDP (Specific Device Profile, ETG.5003-2xxx) for the following applications:

  • Abatement and Sub Fab Systems
  • DC & RF Power Generator
  • Mass Flow Controller
  • Process Control Valve
  • RF Match
  • Roughing
  • Pump Temperature Controller
  • Turbo Pump
  • Vacuum Pressure Gauge


comX 51CA-RE\R



Hilscher Gesellschaft für Systemautomation mbH